Zeszyty Naukowe. Elektryka / Politechnika Łódzka > 2005 > z. 105 > 123-143
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ISSN czasopisma : | 0374-4817 |
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[1] Davies F.R., Rodgers M.S., Montague S.: Design Tools and Issues of Silicon Micromachined (MEMS) Devices, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.
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[2] Gary K., Fedder, Tamal Mukherjee: Physical design for surface-micromachined MEMS, the 5th ACM/SIGDA Physical Design Workshop, Reston, VA USA, April 15-17, 1996, pp. 53-60.
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[3] Bernhard E. Boser: Surface Micromachining An IC-Compatible Sensor Technology, Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley.