Comparison of numerical simulation and experimental data for nanoindentation studies of nanostructural carbonaceous-palladium films (C-Pd) is presented. Finite Element Method (FEM) and ANSYS program (Ansys, Inc) were used. Traditional Oliver-Pharr method for cone and spherical shaped indenter were applied for FEM modelling of nanoindentation experiment. FEM simulations showed that Pd nanograins are moved in carbon matrix toward the film surface due to an external stress. Distribution of palladium grains in the film volume influence on the Young modulus and nanohardness was also found
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