Carbon nanotubes films have been studied with SEM and TEM. The studied films were obtained using a two step method: PVD process and CVD process. Strongly defected and curled carbon nanotubes containing Ni nanoparticles formed the film with thickness of about 300–400 nm. Observed carbon nanotubes were of lengths from 100 nm to 300 nm and did not stick to each other.
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