Growth processes of nanocomposite layers obtained by polyelectrolytes, poly(sodium 4-styrenesulfonate) (PSS) and poly(diallyldimethylammonium chloride) (PDADMAC), self-assembled on silicon surface using layer-by-layer (LbL) technique were investigated, and theoretical and experimental data are herein reported. Complementary microstructural and compositional analyses techniques (scanning electron microscopy, ellipsometry, X-ray reflectivity, zeta (ξ) potential measurements and attenuated total reflection infrared spectroscopy) were used for deep characterization of the multilayer structure formation. Electrophoretic zeta (ξ) potential measurements indicated that the surface charge was either positive or negative, depending on the polyelectrolyte used (PDADMAC or PSS). ATR-IR spectra confirmed the successfully silanization process and then, the building up of the nanocomposite layer. Morphological investigation and X-ray reflectivity demonstrated the growth process and cross-section size of the bilayers. Ellipsometric measurements were in very good agreement with SEM and XRR, showing once again the successful deposition of polyelectrolyte multilayers. <alternatives> [...] </alternatives>
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