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In this work, the oblique single grain boundary (oSGB) in 3D NAND unit cells is simulated with various temperatures to study threshold voltage (Vth) variation due to oSGB in 3D NAND unit cell of poly-Si channel. As the temperature increases, the overall Vth variations with oSGB decrease because of thermionic effect and more free carrier from generation effect. In addition, the difference of Vth variation...
We investigate the electrical variability of polysilicon (poly-Si) channels with the single discrete dopant (SDD) and single grain boundary (SGB) for 3D NAND applications. A 3D simulation is used to investigate the effect of the SGB and the SDD on the threshold voltage (Vth) and subthreshold swing (S/S) variation where the SDD and SGB are randomly located in poly-Si channels. The SGB affects the entire...
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