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Spectra have been recorded from a Xe discharge capillary discharge source in the extreme ultraviolet (EUV) region between 10nm and 70nm. The origin of the spectra have been analyzed, which have shown that the spectra between 10nm and 20nm come from the transitions of 4p-4d, 4d-4f and 4d-5p by Xe7+∼Xe12+, and the spectra between 20nm∼70nm mainly from the transitions of Xe6+∼Xe8+ as well. The results...
In this paper the influence of pre-pulse current on capillary discharge Ne-like Ar 46.9nm soft-X ray laser is reported. The variation of laser signal obtained by X-ray diode as the amplitude of pre-pulse current under different time delay between the pre-pulse current and the main current is discussed. It shows that when the other character is the same, there must be optimal amplitude of pre-pulse...
The first capillary discharge produced plasma extreme ultraviolet source has been started in China. Fundamental characteristics of DPP including current, Xe gas pressure, extreme ultraviolet energy and spectrum in extreme ultraviolet region have been studied. A high voltage power source is employed, which voltage can be changed from 20kV to 30kV, and the current is from 25kA to 45kA with a FWHM of...
For the purpose of controlling preionized plasma state in capillary precisely, we developed a new prepulse and mainpulse delay circuit. A Single-Chip Microcomputer (SCM) chip was utilized as the delay time unit of the circuit. Measures had been taken in the design process of the circuit to make sure that its function cannot be disturbed by intense electromagnetic interference generated by capillary...
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