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Phosphorus-carbide (CP x ) thin solid films have been deposited by unbalanced reactive magnetron sputtering from a compound C-P target and investigated by transmission electron microscopy, X-ray photoelectron spectroscopy, scanning electron microscopy, elastic recoil detection analysis, Raman scattering spectroscopy, nanoindentation, and four-point electrical probe techniques. CP x ...
The dependency of the stress present in Mo/Si/C multilayers on the constituent individual layers has been investigated. The heat treatment of a multilayer stack, consisting of a highly reflective multilayer and an optimised buffer layer, has resulted in a large reduction of the internal stress in the stack without significantly reducing the extreme ultraviolet (EUV) reflectivity of the highly reflective...
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