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Nanoantenna using mechanical resonance vibration is made from an indium tin oxide (ITO) coated vertically aligned nanorod array. Only this structure works as a radio with demodulator without any electrical circuit using field emission phenomenon. A top-down fabrication method of an ITO coated nanorod array is proposed using a modified UV lithography. The received radio frequency and the resonance...
This paper presents a four-mask fabrication process of lateral nanoelectromechanical (NEM) electrostatic actuators based on spacer technology. Critical dimensions of the actuators, i.e., the beam width and the gap size between the movable and fixed electrodes can be made smaller than the lithographic resolution by creating nitride spacers on an oxide hardmask followed by selective etching of the oxide...
This study presents a new fabrication method for high frequency nanomechanical resonators by utilizing carbon layers with embedded single walled carbon-nanotube layers. The carbon layers, fabricated by pyrolysis of photo- or electron beam resists, showed low-density and moderate Young's modulus which is suitable to sensitive nanodevices. The carbon-nanotube layers underneath carbon layers enhanced...
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