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The microstructure, hardness and wear property of Mo–O–N films deposited at different oxygen gas flow rates, fO2, on SUS304 stainless steel were investigated. The hardness, H, of the film increased with increasing fO2 in a low fO2 region (fO2≤0.05sccm) and reached a maximum value of about 32GPa because of grain refinement. With further increasing fO2, the H started to decrease due to the formation...
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