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Front side etching combined with sample tilting – instead of wafer through etching – allows for transmission electron microscopy (TEM) investigations on nanostructures integrated in microelectromechanical systems (MEMS). We present electron diffraction of an individual single-walled carbon nanotube (SWNT) suspended between sharp polycrystalline silicon tips as far as 165μm away from the MEMS chip...
Front side etching in combination with sample tilting – instead of wafer through etching – allows for transmission electron microscopy (TEM) investigations on nanostructures integrated in microelectromechanical systems (MEMS). We present electron diffraction (ED) of an individual single-walled carbon nanotube (SWNT) suspended between sharp polysilicon tips on the bulk of a MEMS chip. This novel approach...
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