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Single Langmuir probe (SLP) is one of the well-known electrostatic diagnostic methods, which can measure various plasma parameters, such as electron temperature, plasma density, and plasma potential. However, the SLP cannot be applied in some plasmas, such as dust plasmas and processing plasmas containing deposition gases or dust particles, without probe tip cleaning. To overcome the weakness of the...
High-performance 130 nm E-mode InAs p-HEMTs is fabricated using the Ne-based ALET and the buried Pt gate technology. Results from the combination of the improved gate-to-channel aspect ratio achieved by the buried Pt gate technology show that performance of the device is remarkable and the improved carrier transport property is achieved using the ALET technology.
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