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In earlier works, the inelastic mean free path (IMFP) of electrons was determined by elastic peak electron spectroscopy (EPES) using Ni and Ag reference standard samples, but fully neglecting surface excitation. Surface excitation that is characterized by the surface excitation parameter (SEP), and may affect considerably the elastic peak for the sample and the reference material. The SEP parameters...
Elastic peak EPES-REELS spectra have been measured on polySi, aGe, GaAs, GaP, InSb and InAs samples for primary energies E=0.2-5keV, using the ESA 31 HSA spectrometer. The investigated specimens exhibit plasmon dominated loss spectra. We applied two approaches to separate surface and bulk plasmons. Firstly the normalized K(E,E L )λ i (E) inelastic scattering spectra, deduced from REELS...
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