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Series coupled triple quantum dots (TQDs) have been studied as an important element of quantum computers. It is needed to fabricate QD array connected in series with a compact structure to scale up the quantum bits. To develop quantum bits based on the TQDs, evaluation of the charge stability diagram is needed. However, since the center gate usually couples to all dots in the compact TQDs, it is difficult...
The breakdown (TDDB/SILC) characteristics of nMOS transistors with hafnium-based gate dielectric stacks of various zirconium content were investigated. It is found that the gate stack composition affects the SILC-voltage dependency while the voltage value chosen for SILC monitoring impacts significantly the SILC-based lifetime projection. For the worst case lifetime evaluation, SILC should be monitored...
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