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In this work, structural and optical properties of vanadium oxides have been presented. Thin films were manufactured by microwave-assisted magnetron sputtering process. Particles were sputtered from a vanadium target in Ar/O2 atmosphere. Oxygen partial pressure was changing from 3×10-4 to 7×10-4 Torr. After the deposition, the thin films were additionally annealed at 400 °C in ambient air in order...
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