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Availability of ultraviolet optical thin film materials, especially high index refractory oxides that transmit down to deep ultraviolet (approx. 0.2 μm) is very much limited. The present article discusses some of the research optimization studies on gadolinium oxide (Gd 2 O 3 ), a novel lanthanide sesquioxide material, for such challenging spectral requirements. Optical and topographical...
Gadolinium oxide thin films have been prepared by electron beam evaporation with different reactive oxygen pressures at low ambient substrate temperature. These thin films have been analyzed with phase-modulated spectroscopic ellipsometry and multi-mode atomic force microscopy (AFM). The distinct influences of oxygen pressure on surface topographies, microstructures and refractive indices of the thin...
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