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GexAsySe100-x-y glasses with 0les xles40 and 12lesyles40 have been characterized for properties of bulk material as well as thermally deposited films. The effect of phase separation on film properties is studied.
We present evidence for nano-scale phase separation of As2S3 films prepared by ultra-fast pulsed laser deposition and its effect on line edge roughness in plasma etched waveguides. By changing the plasma chemistry from CF4-O2 to CHF3-O2, we demonstrate a two times reduction in roughness.
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