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This abstract describes the design, fabrication and testing of microfabricated 100 GHz coupled-cavity backward wave oscillator (CCBWO), which is operated in space harmonics -1 at 12 kV and 50 mA with round-beam radius 0.18 mm. The RF performance has studied using 3-D electromagnetic field simulator and particle-in-cell code. The cold-test assembly has been fabricated. The complete device assembly...
For the generation of millimeter wave from vacuum electron devices, the microfabrication of an interaction circuit is one of the key factors. Two different technologies, a deep etch X-ray lithography (x-ray LIGA) and a deep reactive ion etching (DRIE), were employed for the comparative study and the realization of a backward-wave oscillator. Both methods showed accurate and reliable results, which...
Two 100 GHz backward wave oscillators are being developed using two-step deep-etch X-ray lithography (LIGA) fabrication. Based on previous experiments, beam transmission issue was resolved in two ways by modifying the magnetic confinement system and the beam tunnel size. The coupled cavity BWO (CCBWO) is numerically predicted to have start- oscillation current of 30 mA and produce output power of...
Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time for the application to millimeter and submillimeter wave vacuum devices. The experiment of the two-step LIGA-fabricated folded waveguide BWO with a 12 kV electron gun using thermionic cathodes and cold cathodes using carbon nanotubes are being investigated at the frequency of 0.1 THz.
Most recently, 95GHz three-dimensional folded waveguide structure including the electron beam-tunnel is completely microfabricated by two-step deep-etch X-ray lithography (X-ray LIGA). The precision and positional tolerance of the circuit elements are respectively 2mum and 2-3 mum. We experimentally measured its dispersive and attenuative properties through scattering matrices and compare them to...
An rippled-wall RBWO is operated at the beam voltage of 250~400kV and current of 2.1~3.4 kA using the 130nsec, single shot using Seoul National University's electron beam accelerator (SEBA). SEBA produces a hollow beam of 19.2mm-outer radius, 0.7-thickness guided by an axial magnetic field of 1.7-3.4 Tesla. The uniform ripple has a period of 11mm, mean radius of 14mm and ripple amplitude of 2mm. A...
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