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Most recently, 95GHz three-dimensional folded waveguide structure including the electron beam-tunnel is completely microfabricated by two-step deep-etch X-ray lithography (X-ray LIGA). The precision and positional tolerance of the circuit elements are respectively 2mum and 2-3 mum. We experimentally measured its dispersive and attenuative properties through scattering matrices and compare them to...
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