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Roll‐to‐roll hot embossing is exploited for the fabrication of 1D nanogratings and 2D nanopillar arrays. Critical structure diameters as low as 150 nm and distances down to 50 nm are replicated in a polystyrene foil using flexible nickel shims, which are made using electron beam lithography and subsequent electroplating. The high quality of the as‐fabricated structures is proven by their application...
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