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In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz-75 MHz were fabricated and characterized with coupling coefficient of 0.67-0.79. Transducers with a frequency of 75 MHz...
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