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Ag/W multilayers with periodicity ranging from 15 to 200nm were deposited by direct current magnetron sputtering. The microstructure, hardness and elastic modulus were investigated by X-ray diffraction, Rutherford backscattering, X-ray fluorescence, scanning electron microscopy and nanoindentation. The results show that multilayers with periodicity less than 50nm have columnar porous structure, which...
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