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The plasma interaction with the surface produces modifications of its chemical structure or morphology. Surface modifications through cold plasma occur, thanks to the high plasma reactivity and ability to affect the surface of materials.The present work shows the surface modification of polyethylene terephthalate (PET) films after the exposure both to low-pressure plasma (film deposition by plasma...
Experimental characterization of the plasma state as well as the neutral gas phase in a low pressure discharge is presented. A radiofrequency supply produces plasma driving an electrical discharge in a gas mixture through a resonant inductive coupling. The plasma state has been characterized by means of electrostatic probes, optical emission spectroscopy. Mass spectroscopy of the neutral and of the...
A characterization of the device-pumping behaviour of our vacuum reactor for plasma treatment of materials at low pressure is presented. The analysis of the pumpdown curves measured both in the viscous and in the molecular regimes was made to study the outgassing flowrates of several leather materials. Estimates of the relevant flowrates in different pressure ranges and measurements of the flow composition...
We have implemented a gas-phase chemistry numerical simulation of a typical radio frequency, low-pressure plasma. We have applied it to the study of CH 4 /Ar plasmas used for the deposition of diamond and diamond-like carbon films. Our results show that CH 3 is the most abundant carbon-containing radical in pure methane discharges and in CH 4 /Ar mixtures at low argon concentrations,...
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