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We have extended measurable pressure range of the thin film Pirani vacuum sensor that is still sensitive above 1 atm. In our thin film Pirani vacuum sensor, our proposed temperature difference sensor of the short circuit Seebeck-current detection type thermocouple is used in order to get extremely high sensitivity, especially in high vacuum range. We have achieved much wider measurable pressure range...
We have proposed the thin film vacuum sensor that has a cantilever structure with new temperature difference sensors of the short circuit Seebeck-current detection type thermocouple in order to get higher sensitivity in the higher vacuum range. Temperature difference, which should be zero under the higher vacuum, between microheater and thermally isolated heading area from the microheater is measured...
Novel temperature-difference sensor based on the short-circuit current measurement of a single thermocouple using the imaginary short of the OP amplifier is proposed, and a method to evaluate the performance of the thermal sensor by use of the generated power due to the IR absorption is presented. This new concept is demonstrated as an IR sensor
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