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In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains on lithium niobate bonded on silicon. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3" 500 mum thick wafer. These devices have then been bonded on a silicon wafer and thinned to a few ten microns...
The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element...
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