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The effects of substrate temperature (Ts) on the electrical and optical properties of amorphous InGaZnO thin films deposited by sputtering have been investigated. As Ts increased from RT to 400°C, all the films remained amorphous, the transmission in the visible region increased from 92.8% to 93.54%, and the band gap decreased from 3.42eV to 3.31eV. Based on Cauchy–Urbach model, the optical properties...
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