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In spectroscopic ellipsometry (SE) measurements of thin films with inhomogeneous optical thickness, the spot size of the probe beam on the sample surface is a highly critical parameter in the treatment of the experimental data. SE measurements were performed on transparent samples prepared by various techniques: plasma enhanced chemical vapor deposition of diamond him, spin-coated PMMA films and thermally...
The mechanical, thermal and optical properties of thin coatings have been considerably improved these last years. For instance optical coatings for laser mirrors with sub ppm losses are now available. Moreover thermal diffusivity varying over more than 4 orders of magnitude can be found when going from polymers coatings to diamond ones. Reliable sensitive techniques are necessary to characterize...
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