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The degradation behaviors of Ti1−xZrxN coatings due to repeated thermal stress were investigated in terms of local atomic structural changes according to Zr substitution. The coating specimens deposited by TiZr compound targets with different Zr wt% ratios had the same growth orientations of TiN and ZrN, namely (111), (200), and (220). The lattice parameter and microhardness increased as the Zr ratio...
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