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In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated...
An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model...
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