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Nanoscale containers and devices fabrication and application are recently attracted much attention. The surface profiles of nanoscale patterns are very important for nanotechnology and nano-devices integration. Nanopits and nanopores arrays are fabricated with focused ion beam tool. The morphologies of these small containers were explored by atomic force microscopy. The topography of every nanopattern...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
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