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We demonstrate a monolithic integration of a photodiode array and a 13 channels arrayed waveguide grating (AWG) grown on InP substrate with a shallow trench structure between the AWG top cladding layer and the photodiode p-doped layer. A smooth epitaxial structure interface is obtained by nonselective regrowth to make the two epitaxial structure compatible and fabrication easy. Three-dimensional finite-difference...
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 10 channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Two structures have been designed for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array : One is a seamless joint...
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