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Nanotechnology is based on a combination of many technologies such as high precise positioning and force control, especially magnetic recording, biotechnology and semiconductor industry require the utilization of nanotechnology. To date, various actuator systems have been proposed, but their structural models show working distances of either less than a millimeter or over ten millimeters. Structural...
High precise positioning and force control are based on nanotechnology. Nanotechnology, especially nanometer positioning technology with high speed and robust force feedback control requires the utilization of a variety of technical fields including magnetic recording, biotechnology and the semiconductor industry. Until now there have been various actuator systems proposed, but the structure models...
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