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A high-sensitivity tri-axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross-shaped Si structure and a double-layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the cap...
We propose a skin-type tactile sensor with standing piezoresistive cantilever to detect micro size texture of object. By forming micro ridges to the sensor surface as a finger print, the sensitivity of the tactile sensor increased for micro texture scanning. This characteristic enabled the detection of 500nm high 300μm wide bumps arranged with 50μm pitch on a flat surface. This...
This paper reports on direct measurement of differential pressure on a butterfly wing during free flight. Differential pressure was measured using a micro-fabricated sensor. A piezo-resistive cantilever was used as a differential pressure sensor. The sensor was 1.0 mm ?? 1.0 mm ?? 0.3 mm in size and 0.7 mg in weight so that it did not interfere with wing motion. By attaching the sensor to the center...
We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing...
This paper reports on a method for estimating direction of a sound with one directional acoustic sensor. Inspired by the two input structure of bushcricket ear, our sensor was designed to have an acoustic channel and a micro piezo-resistive cantilever. The radiated sound acts simultaneously on the external and on the inner surface of the cantilever. As the result, the directionality of our sensor...
This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist...
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