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This paper reports on a triaxial tactile sensor using piezoresistive beams. The sensor chip is composed of two pairs of sidewall-doped Si beams for shear stress sensing and one pair of surface-doped Si beams for normal stress sensing. The sizes of the shear- and pressure-sensing beams are 180μm×15μm×20μm and 250μm×50μm×20μm (length×width×thickness), respectively. The sensor chip is embedded in a PDMS...
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