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We report our setup and measurement results of the quality factor Q of superconducting microwave resonators at mK temperature in a dilution refrigerator. The power dependence of the superconducting resonators' Q was measured down to the single photon level. Measurements were performed on two types of microwave resonators. First, a half-wavelength coplanar waveguide (CPW) resonator made of niobium...
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar...
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