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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
This study presents a novel approach to fabricate highly-structured 3D vertically-aligned carbon nanotubes (VA-CNTs) architectures, and further integrates 3D VA-CNTs with MEMS surface micromachining to fabricate suspended 3D CNTs structures. The merits of presented approach are as follows: (1) highly-structured 3D VA-CNTs stacks can be achieved by predefining multilayered Al/Fe catalyst films; (2)...
This study presents a novel concept for the formation of curvature micro lens and the lens-curvature tuning using the hydraulic pressure and surface tension assisted molding process. The liquid UV-curable polymer is defined by hydraulic pressure, surface tension, and molding, and then solidified by UV-light to form t he micro-lens. Merits of the process technology are: (1) initial lens curvatures...
This study demonstrates the concept of controlling the quality factor of a micro-cantilever using hydrodynamic coupling of active mechanical structures. The active micro structures (auxiliary-cantilevers) adjacent to the micro-cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of the operating-cantilever. Thus, the quality factor of operating-cantilever...
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