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A novel MEMS inertial switch with electrostatic force assistance and multi-step pull-in behavior has been designed, which can help the electrodes weaken the bounce and keep a long contact in the inertial switch before the leakage of electricity ends compared with the traditional rigid contact between electrodes. The dynamic switching and pull-in performance is simulated by finite element method. The...
This paper presents the fabrication of a through-glass-via (TGV) substrate with an integrated high-g MEMS shock threshold sensor on it, which will minimize the die size of the whole sensor, avoid lead-wire bonding and facilitate the surface mount. Moreover, smaller volume could also improve the anti-shock capability of the sensor. The TGV substrate is fabricated by developed composite-mask powder...
This paper reports a novel micro airflow anemometer based on the hot-film sensing principle, i.e. gas cooling of electrically heated resistance. The sensor with three Ti/Pt hot-film sensing components with width of 50µm and thickness of 130nm has been fabricated on a glass tube in a UV lithography system with multi-layer alignment by our developed MEMS compatible lab-on-a-tube technology. The micro...
In this paper, a new model has been proposed for the design of inertial micro-switch. Compared with the traditional model consisted by movable-fixed electrode, the electrodes are designed as two movable springs. The dynamic response processes of electrodes can be controlled via the structure parameters. The simulation results indicated that the elastic contact can effectively prolong the holding time...
An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and fixed electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed...
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