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New zirconium oxide (ZrO2)-based organic-inorganic multilayers were fabricated and tested for flexible moisture barriers and compared with typical aluminum oxide (Al2O3)-based multilayers. We report that amorphous ZrO2 had a better intrinsic barrier property than that of amorphous Al2O3. Due to the lower elastic modulus of ZrO2, the ZrO2-based structures had better flexibility than that of the Al2...
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