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This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area...
This paper presents a microelectromechanical systems contact switch having both hard and soft contact materials in a single cantilever-type switching device. It operates with a zipping mechanism within which both contact materials (Pt-to-Pt and Au-to-Au) make individual contact sequentially and then detach in a reverse sequence to take advantage of both contact materials: low contact resistance and...
This paper reports a novel electrical detection of label-free DNA by use of a MEMS electrostatic micro-switch. The electrostatic micro-switch detects the immobilization of probe oligonucleotides and their hybridization with target oligonucleotides using pull-in voltage shift in the micro-switch originated from negative charges of the oligonucleotides. A numerical simulation is analyzed to support...
This paper reports a cantilever switch which provides fast switching and robustness using extended gate electrode and unique dimple structure. The gate electrode extended along the length of the beam enabling higher holding force at the moment of the contact, which facilitated the suppression of the dynamic bouncing. The dimple structure was also introduced along the beam's length preventing the beam...
This paper reports an innovative method for maneuvering the pull-in voltage by adopting the coplanar pre-charged electrode to the conventional MEMS switch. In the simulated results (CoventorWare??), the initial pull-in voltage of 55 V was reduced to 5 V with a little change of the pull-in height. The proposed MEMS switch was properly fabricated with the surface micromachining. The fabricated switch...
A nanoelectromechanical (NEM) switching device is developed with a new technique involving a liquid medium. Operation voltage is reduced by about 40% and the number of switching cycles with reliable device performance is improved dramatically, more than 5-fold. The device has a 50 nm thick TiN cantilever with a 40 nm air-gap. A CMOS compatible process is employed.
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