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The synthesis of single crystal AlN particles has been carried out by the chemical vapor method using AlCl3 and NH3 as sources at 1450 °C. The x‐ray diffraction (XRD) measurement reveals that the samples are AlN in the wurtzite structure. The XRD line width had its minimum around partial pressure of NH3 (P (NH3)) of 0.25 atm, indicating the highest crystal quality among the samples synthesized in...
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