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Novel microcavity plasma jet devices operating at atmospheric gas pressure have been fabricated in a flexible, robust and optically transparent polymer. By a micromolding process, large scale arrays of microcavities, each having a diameter of hundreds of microns and embedded electrodes, have been fabricated with various form factors that can be precisely controlled.
For novel biomedical applications such as unconventional and large area treatment, an array of microplasma jets produced in 200 µm diameter channels has been designed and fabricated in several material platforms, including alumina and polymers. For the experiments reported here, the jet array was fabricated in an Al/Al2O3 structure and driven by a sinusoidal waveform having an RMS voltage of ∼1 kV...
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