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Dielectric barrier discharges have been used to deposit fluorocarbon (FC) films on various materials, such as paper, glass, and silicon substrates. The primary monomers used for plasma polymerization were difluoromethane (CH 2 F 2 ), octafluoropropane (C 3 F 8 ), and octafluorocyclobutane (C 4 F 8 ). FC films were characterized using Fourier transform...
Fluorocarbon (FC) films deposited in continuous wave (cw) and pulsed difluoromethane radio frequency (r.f.) plasmas were characterized using Fourier transform infrared spectroscopy and atomic force microscopy. The effects of varying r.f. power, cw/pulsed discharge mode, and the distance of the substrate from the coil on the deposition rate, film structure, and surface roughness were investigated....
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