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In order to measure the milling area temperature in-situ, the milling tool embedded with NiCr/NiSi thin film thermocouple (TFTC) is prepared. TFTC capable well temperature performance is embedded on the tool tip by successively depositing SiO2 insulating film, NiCr/NiSi thermoelectric film, and SiO2 protective film. Surface morphology and thin film properties are confirmed to achieve expectation by...
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