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The single motion cycles of an electrothermal actuator were measured with nanometer and microradian precision, using a recently introduced particle tracking method. The actuator linked two rigid bodies that translated and rotated. Stochastic input noise decoupled and coupled the two bodies within the play of the linkage, resulting in a nondeterministic output. The linkage was characterized using a...
Super-resolution fluorescence microscopy is used for the first time to study the nanoscale kinematics of a MEMS device in motion across a surface. A device under test is labeled with fluorescent nanoparticles that form a microscale constellation of near-ideal point sources of light. The constellation is imaged by widefield epifluorescence microscopy, and the image of each nanoparticle is fit to a...
The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby validating their use of the documentary standard test methods. Examples of NIST reference values are given...
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate-based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensors, including resistance temperature detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
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