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Using a single-mask add-on process module, two usually non-coexistent properties of cantilevers, large stiffness and large force sensitivity, are summoned in a single device. To achieve this, a stress-concentrating (SC) principle is used: instead of decreasing the cantilever thickness, which is the conventional approach in increasing its force sensitivity, the stress is locally concentrated in piezoresistive...
A novel approach for enhancing the sensitivity of piezoresistive cantilever sensors is presented. Thin piezoresistive clamped-clamped silicon beams are released on the surface of the cantilever by a micromachining process sequence combining deep-reactive ion etching and anisotropic wet etching of silicon. A deflection of the cantilever sensor yields a stress concentration in these micromachined piezoresistive...
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