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This paper presents a novel resonant-microsensor platform for chemical and biological sensing applications in gaseous and liquid environment. The disk-shape microstructure is operated in a rotational in-plane mode with typical resonance frequencies between 300 and 1000 kHz. By shearing the surrounding fluid instead of compressing it, damping is reduced, and high quality factors are achieved. The resonators...
The influence of beam geometry on the quality factor Q of resonant cantilever sensors operated at atmospheric pressure has been investigated. The studied rectangular silicon cantilevers have lengths and widths ranging from 70-500 mum and 80-160 mum, respectively, and thicknesses of 5, 8, and 17 mum. Transverse cantilever vibrations are excited electromagnetically and the flexural resonance modes of...
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