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The chemical sensing behavior of disk microresonators, as it is affected by the thickness of polymer coatings applied to them, is reported. The disk microresonators were fabricated using a CMOS-compatible silicon bulk micro machining process. The disks were subsequently coated with layers of (poly) isobutylene (PIB) as a sensing film and exposed to gaseous benzene, toluene, and m-xylene. The experimental...
Chemical sensitivities and limits of detection to volatile organic compounds (VOCs) for polymer-coated disk resonators in the gas phase are reported. The dependence of the sensor performance on the device geometry is investigated. The use of rotational inplane modes results in high frequency stabilities, with Allan variances as low as 7.8 times 10-9 being achieved for 25 mum thick resonators. A limit...
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