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The application of a resonant microsensor platform based on disk-type microstructures vibrating in an in-plane resonance mode for biochemical sensing in liquid environment is described. Based on the measured short-term frequency stabilities of 1.1 10-8 in air and 2.3 10-6 in water, low femtogram and sub-picogram detection limits can be achieved in air and in liquid, respectively. The feasibility of...
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