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The nanostructured multilayer silica–titania or silica–titania–alumina films doped with Er3+ were prepared by sol–gel method. The sol–gel method is a flexible and convenient way to prepare oxide films on several types of substrates, and for this reason it was extensively investigated for optical waveguides fabrication. The selected molar composition was 90%SiO2–10%TiO2 or 85%SiO2–10%TiO2–5% Al2O3...
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