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When suspended elastic microstructures are unexpectedly pinned to their underlying substrates, it results in stiction failures. Over the last couple of decades a wide variety of processing, surface and physical schemes such as anti-stiction coatings, supercritical drying and sacrificial supports [1] have been employed to reduce stiction failure rates in MEMS, but most involve expensive machinery or...
In this paper we present a new kind of high sensitivity chemo-mechanical sensors. These devices consist of a torsional conductive see-saw paddle suspended by two torsional springs from a substrate with symmetric electrodes under each paddle wing. One of the wings is coated with a thin chemically sensitive polymer layer that swells when a specific compound vapor is absorbed. The absorption induced...
A single layer nanothermite spin coated gel has been utilized as a solid-state exothermic energy release layer for triggered microchip transience. A proportional combination of self-assembled CuO/Al nanothermite and Napalm-B as gelling agent has been used to develop for the first time a spinable nanothermite film onto the surface of a micro-chip. This layer when ignited instantaneously releases enough...
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