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We present a new type of amplified chemomechanical comb-type capacitive gas sensors (ACMs) consisting of a set of flexible sense fingers with asymmetric absorbing polymer patches and side electrodes. This device combines the high sensitivity features of stress-deformed gas sensors and parametric amplification. Preliminary experiments with water and ethanol vapors indicate that the sensitivity of these...
The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10fF/g for a full scale acceleration of 2g and the pressure...
The capacitance-voltage(C-V) and switching characteristics of AlGaN/GaN HEMT has been calculated analytically. The device capacitances and switching parameters, which have been calculated, depends on the basic device parameters and terminal voltages which determine the microwave behavior of a device. The nonvariant nature of this device with drain voltage leads to better device choice for high power...
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